6 results
The Properties of Low Hydrogen Silicon Thin Films Deposited by Mesh-type PECVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 664 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, A5.8
- Print publication:
- 2001
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Atomic Layer Deposition of TiN on Si (100) and (111) Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 616 / 2000
- Published online by Cambridge University Press:
- 10 February 2011, 211
- Print publication:
- 2000
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Effects of Reactive Gas Compositions on the Magnetic Properties and Microstructures of FeTaNC Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 441 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 169
- Print publication:
- 1996
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A Study on the Residual Stress of Diamond-Like Carbon Films Deposited by Magnetically Enhanced RF PECVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 441 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 671
- Print publication:
- 1996
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Suppression of Surface SiO2 Layer and Solid Phase Epitaxy of Amorphously Deposited Si Films using Heating-Up Under Si2H6 Environment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 448 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 345
- Print publication:
- 1996
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Effects Of Impurities on the Crystallization and Grain Growth of Polycrystalline Si Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 385
- Print publication:
- 1995
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