6 results
Effects of implantation temperature on the structure, composition, and oxidation resistance of aluminum-implanted SiC
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- Journal:
- Journal of Materials Research / Volume 10 / Issue 6 / June 1995
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1441-1447
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- June 1995
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P-type Doping of SIC by Aluminum Implantation for Advanced Device Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 410 / 1995
- Published online by Cambridge University Press:
- 10 February 2011, 63
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- 1995
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Effects of Implantation Temperature on the Structure, Composition and Oxidation Resistance of Sic
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 281
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- 1994
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Oxidation of Silicon Implanted with High-Dose Aluminum
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 207
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- 1994
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Enhancement of Oxidation Resistance of Silicon Carbide by High-Dose and Multi-Energy Aluminum Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 327 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 281
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- 1993
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Low Temperature Mocvd of Silicon-Based Ceramic Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 168 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 331
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- 1989
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