7 results
Mechanical and Electrical Properties of Electroplated Copper Thin Films Used for Thin Film Interconnection
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-F08-07
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- 2010
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Influence of Intrinsic Defects and Strain on Electronic Reliability of Gate Oxide films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 917 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0917-E05-28
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- 2006
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Influence of Oxygen Vacancies and Strain on Electronic Reliability of SiO2-x Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 864 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, E9.19
- Print publication:
- 2005
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Mechanical-Stress-Controlled Silicide Interconnections for Highly Reliable Semiconductor Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B13.5
- Print publication:
- 2002
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Internal Stress Change of Phosphorus-Doped Amorphous Silicon Thin Films During Crystallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 343 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 573
- Print publication:
- 1994
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Residual Stress Measurement in Silicon Substrate After Local Thermal Oxidation Using Microscopic Raman Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 226 / 1991
- Published online by Cambridge University Press:
- 26 February 2011, 345
- Print publication:
- 1991
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Initial Evolution of Cobalt Silicides in The Cobalt/Amorphous-Silicon Thin Film System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 230 / 1991
- Published online by Cambridge University Press:
- 26 July 2012, 139
- Print publication:
- 1991
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