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Defect Analyses in VLSI Devices by TEM Observation and Process Simulation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 629
- Print publication:
- 1992
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- Article
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Defect Annihilation in Czochralski-Grown Silicon During Out-Diffusion Process Probed with Variable-Energy Positron Beam
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 707
- Print publication:
- 1992
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- Article
- Export citation