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B(Ch3)3 as P Layer Doping Gas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 192 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 523
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- 1990
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High Deposition Rate P-I-N Solar Cells Prepared from Disilane Using VHF Discharges
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- Journal:
- MRS Online Proceedings Library Archive / Volume 149 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 447
- Print publication:
- 1989
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Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 118 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 31
- Print publication:
- 1988
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