5 results
Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B03-15
- Print publication:
- 2007
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Nanoporous Materials Integration Into Advanced Microprocessors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B2.1
- Print publication:
- 2005
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Application of Nanoindentation to Characterize Fracture in ILD Films Used in the BEOL.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B8.18
- Print publication:
- 2005
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Characterization of Spin -on Glasses by Microindentation.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 157
- Print publication:
- 1998
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Properties Development During Curing of Low Dielectric-Constant Spin-On Glasses
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 33
- Print publication:
- 1998
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