2 results
Deposition of tungsten on silicon dioxide by GeH4 reduction of WF6
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 93
- Print publication:
- 1992
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Selective Chemical Vapour Deposition of Tungsten Using SiH4/WF6 Chemistry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 168 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 179
- Print publication:
- 1989
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- Article
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