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7 - Package and Test

Published online by Cambridge University Press:  07 September 2011

Joel A. Kubby
Affiliation:
University of California, Santa Cruz
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Summary

In a multi-project wafer process your layout will be included with other users' layouts that are combined together into a wafer level layout. All of the designs will be fabricated together using the same process. When all of the fabrication steps have been completed the wafer is subdivided into individual dies for each of the users using an abrasive diamond saw. Dicing “streets” are put in at the wafer level layout by the supplier to comprehend the “kerf ” (width) of the saw blade and a safety zone for chipping during the sawing operation. The saw blade and wafer are sprayed with water to keep them cool during the dicing operation, and the sawing process generates residual particles that must be removed in a post-sawing cleaning step. At this stage custom steps can be performed for each individual customer at the die level. Some of the custom steps include sub-dicing of the individual die into smaller pieces, post-processing steps such as sacrificial release and critical point drying, and packaging of the parts. Packaging can include attaching the die to a carrier, wire bonding and sealing the package to protect the parts from the environment and to provide a controlled interface (electrical, thermal, mechanical, and/or optical) between the parts and the environment.

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Chapter
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Publisher: Cambridge University Press
Print publication year: 2011

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References

Jafri, IjazBusta, HeinzWalsh, Steven 1999
Mubovidian, RoyaAshurst, W. RobertCarraro, Carlo 2000
Tang, William C.Nguyen, Tu-Cuong H.Howe, Roger T.Laterally Driven Polysilicon Resonant MicrostructuresMicro Electro Mechanical Systems 20 53 1989Google Scholar
Rembe, ChristianKant, RishiMuller, Richard S.Optical measurement methods to study dynamic behavior in MEMSProceedings of SPIE 4400 127 2001CrossRefGoogle Scholar
Guo, TongChang, HongChen, JinpingFu, XingHu, XiaotangMicro-motion analyzer used for dynamic MEMS characterizationOptics and Lasers in Engineering 47 512 2009CrossRefGoogle Scholar

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  • Package and Test
  • Joel A. Kubby, University of California, Santa Cruz
  • Book: A Guide to Hands-on MEMS Design and Prototyping
  • Online publication: 07 September 2011
  • Chapter DOI: https://doi.org/10.1017/CBO9780511984662.008
Available formats
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Save book to Dropbox

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  • Package and Test
  • Joel A. Kubby, University of California, Santa Cruz
  • Book: A Guide to Hands-on MEMS Design and Prototyping
  • Online publication: 07 September 2011
  • Chapter DOI: https://doi.org/10.1017/CBO9780511984662.008
Available formats
×

Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

  • Package and Test
  • Joel A. Kubby, University of California, Santa Cruz
  • Book: A Guide to Hands-on MEMS Design and Prototyping
  • Online publication: 07 September 2011
  • Chapter DOI: https://doi.org/10.1017/CBO9780511984662.008
Available formats
×