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3 - Electrostatic Actuation

Published online by Cambridge University Press:  07 September 2011

Joel A. Kubby
Joel A. Kubby
Affiliation:
University of California, Santa Cruz
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A Guide to Hands-on MEMS Design and Prototyping , pp. 58 - 73
Publisher: Cambridge University Press
Print publication year: 2011

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References

Tang, W.C.Nguyen, T.-C.H.Judy, M.W.Howe, R.T. 1990
Seeger, J.I.Boser, B.E.Charge control of parallel-plate, electrostatic actuators and the tip-in instabilityJ. Microelectromechanical Systems 12 656 2003CrossRefGoogle Scholar
Hung, E.S.Senturia, S.D.Extending the travel range of analog-tuned electrostatic actuatorsJ. Microelectromechanical Systems 8 497 1999CrossRefGoogle Scholar
Tang, W.C.Nguyen, T.-C.H.Howe, R.T.Laterally driven polysilicon resonant microstructuresProc. IEEE Workshop on Microelectromechanical SystemsSalt Lake City, UT53 1989Google Scholar
Osterberg, P.M.Senturia, S.D.M-Test: A test chip for MEMS material property measurement using electrostatically actuated test structuresJ. Microelectromechanical Systems 5 107 1997CrossRefGoogle Scholar
Liu, C.Foundations of MEMSPearson Prentice Hall113 2006Google Scholar
Seeger, J.I.Crary, S.B.Stabilization of electrostatically actuated mechanical devicesTransducers'97, 1997 International Conference on Solid-state Sensors and ActuatorsChicago 1997 1133Google Scholar

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  • Electrostatic Actuation
  • Joel A. Kubby, University of California, Santa Cruz
  • Book: A Guide to Hands-on MEMS Design and Prototyping
  • Online publication: 07 September 2011
  • Chapter DOI: https://doi.org/10.1017/CBO9780511984662.004
Available formats
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  • Electrostatic Actuation
  • Joel A. Kubby, University of California, Santa Cruz
  • Book: A Guide to Hands-on MEMS Design and Prototyping
  • Online publication: 07 September 2011
  • Chapter DOI: https://doi.org/10.1017/CBO9780511984662.004
Available formats
×

Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

  • Electrostatic Actuation
  • Joel A. Kubby, University of California, Santa Cruz
  • Book: A Guide to Hands-on MEMS Design and Prototyping
  • Online publication: 07 September 2011
  • Chapter DOI: https://doi.org/10.1017/CBO9780511984662.004
Available formats
×