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  This chapter has been cited by the following publications. This list is generated based on data provided by CrossRef.

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  Kolenov, Dmytro Meng, Peiwen and Pereira, Silvania 2020. A highly sensitive laser focus positioning method with sub-micrometre accuracy using coherent Fourier scatterometry. Measurement Science and Technology, Vol. 31, Issue. 6, p. 064007.

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• Print publication year: 2019
• Online publication date: April 2019

5 - Aberration Analysis of Optical Systems

• Joseph Braat, Technische Universiteit Delft, The Netherlands, Peter Török, Imperial College of Science, Technology and Medicine, London
• Publisher: Cambridge University Press
• DOI: https://doi.org/10.1017/9781108552264.006
• pp 266-382