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26 results

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  • Measurement and Calculation of X-Ray Production Efficiencies for Copper, Zirconium, and Tungsten
  • Mathias Procop, Ralf Terborg
  • Journal: Microscopy and Microanalysis / Volume 28 / Issue 6 / December 2022
  • Published online by Cambridge University Press: 12 September 2022, pp. 1865-1877
  • Print publication: December 2022
  • View abstract

    Electron probe microanalysis (EPMA) is based on physical relations between measured X-ray intensities of characteristic lines and their X-ray production efficiency, which depends on the specimen composition. The quality of the analysis results relies on how realistically the physical relations describe the generation and emission of X-rays. Special experiments are necessary to measure X-ray production efficiencies. A challenge in these experiments is the determination of the detection efficiency of the spectrometer as a function of the photon energy. An energy-dispersive spectrometer was used in this work, for which the efficiency was determined at metrological synchrotron beamlines with an accuracy of ±2%. X-ray production efficiencies for the L series and the Kα series of copper and zirconium and for the M and L series of tungsten were determined at energies up to 30 keV in a scanning electron microscope. These experimental values were compared with calculated X-ray production efficiencies using physical relations and material constants applied in EPMA. The objective of the comparison is the further improvement of EPMA algorithms as well as extending the available database for X-ray production efficiencies. Experimental data for the X-ray production efficiency are also useful for the assessment of spectrum simulation software.

  • Definition of the Detection Limit in Energy-dispersive Spectrometry
  • Ralf Terborg, Thomas Schwager
  • Journal: Microscopy and Microanalysis / Volume 26 / Issue S2 / August 2020
  • Published online by Cambridge University Press: 30 July 2020, pp. 2188-2189
  • Print publication: August 2020
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  • Analysis and Quantification of Transition Metal Borides with WDS and EDS
  • Ralf Terborg, Silvia Richter
  • Journal: Microscopy and Microanalysis / Volume 25 / Issue S2 / August 2019
  • Published online by Cambridge University Press: 05 August 2019, pp. 1766-1767
  • Print publication: August 2019
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  • New Approaches to Determine K Line Ratios of Pure Elements
  • Ralf Terborg, Falk Reinhardt, Fabian Nitsche, Timo Wolff
  • Journal: Microscopy and Microanalysis / Volume 24 / Issue S1 / August 2018
  • Published online by Cambridge University Press: 01 August 2018, pp. 774-775
  • Print publication: August 2018
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  • Combined EDX and Micro XRF Analysis on SEMs
  • Ralf Terborg, Birgit Hansen, Stephan Bohm
  • Journal: Microscopy and Microanalysis / Volume 22 / Issue S3 / July 2016
  • Published online by Cambridge University Press: 25 July 2016, pp. 438-439
  • Print publication: July 2016
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  • Composition Analysis with EDS; Possibilities for Life Science
  • Meiken Falke, A. Kaeppel, Ralf Terborg
  • Journal: Microscopy and Microanalysis / Volume 22 / Issue S3 / July 2016
  • Published online by Cambridge University Press: 25 July 2016, pp. 1160-1161
  • Print publication: July 2016
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  • Quantitative ED(X)S: The Zeta-Factor Method
  • Meiken Falke, Andi Käppel, Igor Nemeth, Ralf Terborg
  • Journal: Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
  • Published online by Cambridge University Press: 23 September 2015, pp. 2015-2016
  • Print publication: August 2015
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