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Analysis of Elemental Composition of Fe1−xNix and Si1−xGex Alloy Thin Films by EPMA and μ-XRF

Published online by Cambridge University Press:  05 August 2019

Vasile-Dan Hodoroaba ,
Ralf Terborg ,
Stephan Böhm  and
Kyung Joong Kim
Vasile-Dan Hodoroaba
Affiliation:
Federal Institute for Materials Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, Berlin, Germany
Ralf Terborg
Affiliation:
Bruker Nano GmbH, Berlin, Germany
Stephan Böhm
Affiliation:
Bruker Nano GmbH, Berlin, Germany
Kyung Joong Kim
Affiliation:
Korea Research Institute of Standards and Science (KRISS), Division of Industrial Metrology, Daejeon, Korea

Abstract

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Type
Spectroscopy and Imaging of Nanostructured Low-Z Materials in the Electron Microscope
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1786 - 1787
Copyright
Copyright © Microscopy Society of America 2019 

References

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