13 results
Remote plasma assisted MOCVD growth of GaN on 4H-SiC: growth mode characterization exploiting ellipsometry
-
- Journal:
- The European Physical Journal - Applied Physics / Volume 31 / Issue 3 / September 2005
- Published online by Cambridge University Press:
- 14 September 2005, pp. 159-164
- Print publication:
- September 2005
-
- Article
- Export citation
A study of growth mechanism of microcrystalline thin silicon films deposited at low temperature by SiF4-H2-He PECVD
-
- Journal:
- The European Physical Journal - Applied Physics / Volume 26 / Issue 3 / June 2004
- Published online by Cambridge University Press:
- 03 May 2004, pp. 187-192
- Print publication:
- June 2004
-
- Article
- Export citation
Low-temperature growth of HfO2 dielectric layers by Plasma-Enhanced CVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E3.15
- Print publication:
- 2003
-
- Article
- Export citation
GaN Growth by Remote Plasma MOCVD: Chemistry and Kinetics by Real Time Ellipsometry
-
- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 4 / Issue S1 / 1999
- Published online by Cambridge University Press:
- 13 June 2014, pp. 173-178
- Print publication:
- 1999
-
- Article
-
- You have access
- HTML
- Export citation
GaN Growth by Remote Plasma MOCVD: Chemistry and Kinetics by Real Time Ellipsometry
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 537 / 1998
- Published online by Cambridge University Press:
- 15 February 2011, G3.12
- Print publication:
- 1998
-
- Article
- Export citation
Enhancement of the Amorphous to Microcrystalline Phase Transition in Silicon Films Deposited by Sif4-H2-He Plasmas
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 536 / 1998
- Published online by Cambridge University Press:
- 09 August 2011, 493
- Print publication:
- 1998
-
- Article
- Export citation
Photoelectron spectroscopy study of amorphous silicon-carbon alloys deposited by plasma-enhanced chemical vapor deposition
-
- Journal:
- Journal of Materials Research / Volume 11 / Issue 12 / December 1996
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3017-3023
- Print publication:
- December 1996
-
- Article
- Export citation
Processing of InP and GaAs Surfaces by Hydrogen and Oxygen Plasmas: In Situ Real Time Ellipsometric Monitoring
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 448 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 27
- Print publication:
- 1996
-
- Article
- Export citation
Deposition of Photoluminescent Nanocrystalline Silicon Films by SiF4-SiH4-H2 Plasmas
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 452 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 809
- Print publication:
- 1996
-
- Article
- Export citation
Mass Spectrometric Thermal Evolution of Novel Indium Metalorganic Precursors for MOCVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 69
- Print publication:
- 1992
-
- Article
- Export citation
Study of SiF4-N2-H2 Plasmas for the Deposition of Fluorinated Silicon Nitride Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 27
- Print publication:
- 1992
-
- Article
- Export citation
Effect of Plasma Modulation in the Glow Discharge Deposition of Amorphous Silicon Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 289
- Print publication:
- 1990
-
- Article
- Export citation
Plasma deposition of a–Si, Ge: H, F thin films from SiF4–GeH4–H2 mixturesa)
-
- Journal:
- Journal of Materials Research / Volume 4 / Issue 2 / April 1989
- Published online by Cambridge University Press:
- 31 January 2011, pp. 366-372
- Print publication:
- April 1989
-
- Article
- Export citation