12 results
Multilevel Damascene Interconnection in Integration of MOCVD Cu and Low-k Fluorinated Amorphous Carbon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 129
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- 1999
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Thermal stability and structural evolution of low-K Fluorinated amorphous carbon during thermal annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 233
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- 1998
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MOCVD Process of Ferroelectric Lead Germanate Thin Films and Bottom Electrode Effects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 541 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 549
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- 1998
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Initial Stage of Cvd Copper Deposition on Teos Oxide
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- MRS Online Proceedings Library Archive / Volume 403 / 1995
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- 15 February 2011, 681
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- 1995
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Intrinsic Stress in Sputtered Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 356 / 1994
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- 21 February 2011, 131
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- 1994
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Stress and Adhesion of CVD Copper and TiN
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- Journal:
- MRS Online Proceedings Library Archive / Volume 356 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 859
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- 1994
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Diffusion-Induced Precipitation in Arsenosilicate Glass (AsSG)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 338 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 83
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- 1994
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Reaction study of cobalt and silicon nitride
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- Journal:
- Journal of Materials Research / Volume 8 / Issue 9 / September 1993
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2354-2361
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- September 1993
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Evidence of Co/SiO2 reaction during rapid thermal annealing
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- Journal:
- Journal of Materials Research / Volume 8 / Issue 3 / March 1993
- Published online by Cambridge University Press:
- 31 January 2011, pp. 467-472
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- March 1993
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Interactions in and Interfacial Structure of Annealed Co / a-Si3N4 Studied by Hrtem
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
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- 22 February 2011, 57
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- 1992
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Evidence of Oscillating Oxide Growth Mechanism during Oxygen Plasma Oxidation of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 223 / 1991
- Published online by Cambridge University Press:
- 16 February 2011, 229
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- 1991
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Molecular Dynamics Study of Thermal Disorder in a Bicrystal Model
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- Journal:
- MRS Online Proceedings Library Archive / Volume 229 / 1991
- Published online by Cambridge University Press:
- 15 February 2011, 153
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- 1991
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