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Strain-Engineering of Aluminum Scandium Nitride Films Grown Directly on Silicon by Utilizing a Gradient Seed Layer: Application of 4D-STEM Technique
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- Journal:
- Microscopy and Microanalysis / Volume 28 / Issue S1 / August 2022
- Published online by Cambridge University Press:
- 22 July 2022, pp. 444-445
- Print publication:
- August 2022
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- Article
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Strain Engineering in Aluminum Scandium Nitride Thin Film using Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) Technique
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- Journal:
- Microscopy and Microanalysis / Volume 27 / Issue S1 / August 2021
- Published online by Cambridge University Press:
- 30 July 2021, pp. 2204-2205
- Print publication:
- August 2021
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- Article
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- You have access
- Export citation