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Processing of multilayer microcrystalline and nanocrystalline diamond thin films using Ar-rich microwave plasmas
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- Journal:
- Journal of Materials Research / Volume 26 / Issue 24 / 28 December 2011
- Published online by Cambridge University Press:
- 01 December 2011, pp. 3072-3082
- Print publication:
- 28 December 2011
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- Article
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