7 results
Nano-scale Tribological Behavior of Polycrystalline Silicon Structural Films in Ambient Air
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1085 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1085-T01-04
- Print publication:
- 2008
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Chemical Vapor Deposition Coating for Micromachines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 616 / 2000
- Published online by Cambridge University Press:
- 10 February 2011, 21
- Print publication:
- 2000
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Developing a New Material for MEMS: Amorphous Diamond
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- Journal:
- MRS Online Proceedings Library Archive / Volume 657 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, EE7.1
- Print publication:
- 2000
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Performance of Ultra Hard Carbon Wear Coatings on Microgears Fabricated by Liga
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- Journal:
- MRS Online Proceedings Library Archive / Volume 546 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 115
- Print publication:
- 1998
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Energetic Particle Synthesis of Metastable Layers for Superior Mechancial Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 504 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 241
- Print publication:
- 1997
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Energetic-Particle Synthesis of Nanocomposite Al Alloys
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- Journal:
- MRS Online Proceedings Library Archive / Volume 457 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 249
- Print publication:
- 1996
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SIMS Determination of MG+ and AS+ Range Profiles in Photoresist and Polyimide Implant Masks.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 147 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 385
- Print publication:
- 1989
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