4 results
D082 Residual Stresses in Thin TaNx/Ta Bilayers: Origin and Evolution
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- Journal:
- Powder Diffraction / Volume 18 / Issue 2 / June 2003
- Published online by Cambridge University Press:
- 20 May 2016, p. 176
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D080 X-ray Diffraction Metrology Tool for Microstructure Control on 300mm Wafers for Silicon Based Semiconductors
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- Journal:
- Powder Diffraction / Volume 18 / Issue 2 / June 2003
- Published online by Cambridge University Press:
- 20 May 2016, p. 172
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Depth Profiling Biaxial Stresses in Sputter Deposited Molybdenum Films; Use of the Cos2φ Method
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- Journal:
- Advances in X-ray Analysis / Volume 39 / 1995
- Published online by Cambridge University Press:
- 06 March 2019, pp. 363-370
- Print publication:
- 1995
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Peak Broadening in Asymmetric X-Ray Diffraction Resulting from Chi Tilts
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- Journal:
- Advances in X-ray Analysis / Volume 39 / 1995
- Published online by Cambridge University Press:
- 06 March 2019, pp. 499-503
- Print publication:
- 1995
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