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Latest applications of ToF-SIMS characterization for next-generation electronic materials

Published online by Cambridge University Press:  22 July 2022

Tanguy Terlier ,
Qing Ai ,
Siraj Sidhik ,
Aditya Mohite ,
Yan Yao ,
Ming Tang  and
Jun Lou
Tanguy Terlier*
Affiliation:
SIMS laboratory, Shared Equipment Authority, Rice University, Houston, TX 77005, USA
Qing Ai
Affiliation:
Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
Siraj Sidhik
Affiliation:
Department of Chemical and Biomolecular Engineering, Rice University, Houston, TX 77005, USA
Aditya Mohite
Affiliation:
Department of Chemical and Biomolecular Engineering, Rice University, Houston, TX 77005, USA
Yan Yao
Affiliation:
Department of Electrical and Computer Engineering, University of Houston, Houston, TX 77204, USA
Ming Tang
Affiliation:
Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
Jun Lou
Affiliation:
Department of Materials Science and Nano Engineering, Rice University, Houston, TX 77005, USA
*
*Corresponding author: tanguy.terlier@rice.edu

Abstract

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Type
On Demand - Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 990 - 991
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Copyright
Copyright © Microscopy Society of America 2022

References

Hao, F., Chi, X., Liang, Y., Zhang, Y., Xu, R., Guo, H., Terlier, T., Dong, H., Zhao, K., Lou, J. and Yao, Y., Joule, Volume 3, Issue 5 (2019), p. 1349-1359. https://doi.org/10.1016/j.joule.2019.03.017.CrossRefGoogle Scholar
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