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Evaluation of Lattice-Spacing of SiGe/Si by NBD using Two-condenser-lens TEM

Published online by Cambridge University Press:  22 July 2022

Junji Yamanaka ,
Takuya Oguni ,
Yuichi Sano ,
Yusuke Ohshima ,
Atsushi Onogawa ,
Kosuke O. Hara  and
Keisuke Arimoto
Junji Yamanaka*
Affiliation:
University of Yamanashi, Center for Inst. Analysis, Kofu, Japan
Takuya Oguni
Affiliation:
University of Yamanashi, Center for Inst. Analysis, Kofu, Japan
Yuichi Sano
Affiliation:
University of Yamanashi, Center for Inst. Analysis, Kofu, Japan
Yusuke Ohshima
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
Atsushi Onogawa
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
Kosuke O. Hara
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
Keisuke Arimoto
Affiliation:
University of Yamanashi, Center for Cry. Sci. & Tech., Kofu, Japan
*
*Corresponding author: jyamanak@yamanashi.ac.jp

Abstract

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Type
General Physical Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2812 - 2813
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Copyright
Copyright © Microscopy Society of America 2022