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Deep-Ultra-Violet Atom-Probe Tomography Using Automation to Understand Operational Parameter Space: A Progress Report

Published online by Cambridge University Press:  22 July 2022

Ty J. Prosa ,
Dan Lenz ,
Joe Bunton ,
Nick Brewer ,
Gard Groth ,
David A. Reinhard  and
David J. Larson
Ty J. Prosa*
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
Dan Lenz
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
Joe Bunton
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
Nick Brewer
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
Gard Groth
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
David A. Reinhard
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
David J. Larson
Affiliation:
CAMECA Instruments, Inc., Madison, WI, USA
*
*Corresponding author: Ty.Prosa@Ametek.com

Abstract

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Type
Expanding the Limits of Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 710
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Copyright
Copyright © Microscopy Society of America 2022

References

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