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Gas-Phase Silicon Atom Densities in the Chemical Vapor Deposition of Silicon from Silane
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 3
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- 1993
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Direct Measurement of the Reactivity of NH and oh on a Silicon Nitride Surface
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 51
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- 1993
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Laser Probes and Numerical Modeling as Process Diagnostics in Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 117 / 1988
- Published online by Cambridge University Press:
- 22 February 2011, 23
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- 1988
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Laser Studies of the SiH Radical/Surface Interaction During Deposition of a thin Film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 131 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 233
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- 1988
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Laser-Excited Fluorescence Detection of Si2 During Silane CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 29 / 1983
- Published online by Cambridge University Press:
- 21 February 2011, 225
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- 1983
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