Skip to main content Accessibility help
×
Home

Direct Measurement of the Reactivity of NH and oh on a Silicon Nitride Surface

  • R. J. Buss (a1), P. Ho (a1), E. R. Fisher (a2) and William G. Breiland (a1)

Abstract

In order to understand and successfully model the plasma processing used in device fabrication, it is important to determine the role played by plasma-generated radicals. We have used the IRIS technique (Imaging of Radicals Interacting with Surfaces) to obtain the reactivity of NH(X3-) and OH(X2II) at a silicon nitride film surface while the film is exposed to a plasma-type environment. The reactivity of NH was found to be zero both during exposure of the surface to an NH3 plasma and during active deposition of silicon nitride from a SiH4/NH3 plasma. No NH surface reaction was detectable for any rotational states of NH and over a surface temperature range of 300-700 K. OH radicals generated in an H2O plasma were found to have a reactivity of 0.57 on a room temperature oxidized silicon nitride surface. The OH reactivity falls to zero as the temperature of the substrate is raised.

Copyright

References

Hide All
(1) Kushner, M. J., J. Appl. Phys. 63, 2532 (1988).
(2) Ho, P., Breiland, W. G., and Buss, R. J., J. Chem. Phys. 91, 2627 (1989).
(3) Buss, R. J., Ho, P., and Weber, M. E., Plasma Chem. Plasma Process. 13, 61 (1993).
(4) Fisher, E. R., Ho, P., Breiland, W. G., and Buss, R. J., J. Phys. Chem. 96, 9855 (1992).
(5) Fisher, E. R., Ho, P., Breiland, W. G., and Buss, R. J., J. Phys. Chem. 97, 10287 (1993).
(6) Rochow, E. G., Chemistry of the Silicones, (John Wiley and Sons: London, 1951).
(7) Iler, R. K., The Chemistry of Silica, (John Wiley and Sons: New York, 1979).

Direct Measurement of the Reactivity of NH and oh on a Silicon Nitride Surface

  • R. J. Buss (a1), P. Ho (a1), E. R. Fisher (a2) and William G. Breiland (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed