13 results
New Dry-Etch Chemistries for III-V Semiconductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 399
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- 1993
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Tri-Layer Lift-off Metallization Process Using Low Temperature Deposited SiNx
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 259
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- 1992
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Iodine-Based dry Etching Chemistries for InP and Related Compounds
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 123
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- 1992
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Dry Surface Cleaning of Plasma-Etched Hemts
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 131
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- 1992
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HI/H2 ECR Plasma Etching of III-V Semiconductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 268 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 17
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- 1992
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Electron Cyclotron Resonance Plasma Processing of GaAs-AlGaAs Hemt Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 240 / 1991
- Published online by Cambridge University Press:
- 26 February 2011, 293
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- 1991
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Ion Milling Damage in InP and GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 216 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 507
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- 1990
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Plasma Etching of InP and Related Materials in Electron Cyclotron Resonance CH4/H2/Ar Discharges
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- Journal:
- MRS Online Proceedings Library Archive / Volume 190 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 297
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- 1990
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Reactive Ion Etching of III-V Semiconductors Using Hydrogenated Chlorofluorocarbon Mixtures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 201 / 1990
- Published online by Cambridge University Press:
- 26 February 2011, 37
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- 1990
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Reactive Ion Etching of In-Based III-V Semiconductors -Comparison of Cl and C2H6 Chemistries
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- Journal:
- MRS Online Proceedings Library Archive / Volume 158 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 417
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- 1989
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Rapid Annealing of Rie-Induced Damage in GaAs and AlGaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 399
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- 1989
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Ultra-Thin p+ Layers in GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 74 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 737
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- 1986
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Deposition of Low-Stress Encapsulants on InP and GaAs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 75 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 691
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- 1986
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