Decomposition of Sr(tmhd)2 and Ba(tmhd)2 was investigated by thermogravimetric analysis, in-situ FTIR, and mass spectrometry. Both compounds decomposed following 3 steps: 1) decomposition of the ligands, 2) simultaneous vaporization and partial decomposition of metal-organics, and 3) decomposition of the vaporized metal-organics which existed as the oligomeric species.
The Sr source decomposed at lower temperatures and in a narrower temperature range than the Ba source. Also, the gaseous oligomeric species from the Sr source decomposed relatively quickly while the corresponding species from the Ba source decomposed slowly over a long period. Such a difference between the two compounds is due to different bond energies between the metal atom and the ligands, as indicated by our FTIR results.