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A Study On The Thermal Decomposition of Ba(tmhd)2 and Sr(tmhd)2

Published online by Cambridge University Press:  10 February 2011

Hyun-Kyu Ryu ,
Jae Hyun Han  and
Sang Heup Moon
Hyun-Kyu Ryu
Affiliation:
Dept. of Chemical Engineering, Seoul National University, Shilim-dong San 56–1, Kwanak-ku, Seoul, Korea 151–742
Jae Hyun Han
Affiliation:
Dept. of Chemical Engineering, Seoul National University, Shilim-dong San 56–1, Kwanak-ku, Seoul, Korea 151–742
Sang Heup Moon
Affiliation:
Dept. of Chemical Engineering, Seoul National University, Shilim-dong San 56–1, Kwanak-ku, Seoul, Korea 151–742
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Abstract

Decomposition of Sr(tmhd)2 and Ba(tmhd)2 was investigated by thermogravimetric analysis, in-situ FTIR, and mass spectrometry. Both compounds decomposed following 3 steps: 1) decomposition of the ligands, 2) simultaneous vaporization and partial decomposition of metal-organics, and 3) decomposition of the vaporized metal-organics which existed as the oligomeric species.

The Sr source decomposed at lower temperatures and in a narrower temperature range than the Ba source. Also, the gaseous oligomeric species from the Sr source decomposed relatively quickly while the corresponding species from the Ba source decomposed slowly over a long period. Such a difference between the two compounds is due to different bond energies between the metal atom and the ligands, as indicated by our FTIR results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 161
Copyright
Copyright © Materials Research Society 1996

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References

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