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Impurity Gettering in Silicon by Thin Polycrystalline Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 26 February 2011, 1005
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- 1992
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Evaluation of Microdefects in As-Grown Silicon Crystals
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 51
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- 1992
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Deposition of a-SiNx Films by ArF Laser Induced CVD as Diagnosed by Optical Emission Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 95 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 267
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- 1987
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Formation of Silicon Nitride films Newly Developed by the Ion and Vapour Deposition Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 54 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 535
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- 1985
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Effects of Ion Implantation Doping on the Formation of Titanium Silicide on the Diffusion Layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 54 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 769
- Print publication:
- 1985
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