14 results
Silicon Layer Stacking Enabled by Wafer Bonding
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- Journal:
- MRS Online Proceedings Library Archive / Volume 970 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 0970-Y04-01
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- 2006
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Dc Magnetron Reactive Sputtering of Low Stress Ain Piezoelectric Thin Films for Mems Application
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- Journal:
- MRS Online Proceedings Library Archive / Volume 546 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 165
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- 1998
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Plasma Etching of Silicon Dioxide and Silicon Nitride with Non-Perfluorocompound Chemistries: Trifluoroacetic Anhydride and Iodofluorocarbons
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- Journal:
- MRS Online Proceedings Library Archive / Volume 447 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 67
- Print publication:
- 1996
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Characterization of the Piezoelectric Response of Aluminum Nitride Grown by dc Magnetron Sputtering for Applications in Thin-Film Resonators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 215
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- 1996
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Metrology of Very Thin Silicon Epitaxial Films using Spectroscopic Ellipsometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 448 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 493
- Print publication:
- 1996
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Fabrication of Polycrystalline Si1−xGex Films on Oxide for Thin-Film Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 343 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 679
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- 1994
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Growth and Characterization of Silicon-Germanium Films on Oxide by VLPCVD/PE-VLPCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 317 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 603
- Print publication:
- 1993
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Real-time Monitoring and Control of Silicon Epitaxy Using Emission Fourier Transform Infrared Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 324 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 365
- Print publication:
- 1993
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Structural Characterization of Si1-xGex Multilayer Growth On Patterned Substrates by Very-Low-Pressure Cvd
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- Journal:
- MRS Online Proceedings Library Archive / Volume 221 / 1991
- Published online by Cambridge University Press:
- 25 February 2011, 369
- Print publication:
- 1991
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Quantitative Studies on the Evolution of the Polysilicon/Silicon Interfacial Oxide Upon Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 107
- Print publication:
- 1990
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Material Characterization of Low-Temperature Silicon Epitaxial Growth on Patterned Oxidized Wafers by ULPCVD From SiH4/SiF4/H2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 389
- Print publication:
- 1990
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Structural Defects of Silicon Epitaxy and Epi/Substrate Interface Related to Improper In-Situ Surface Cleaning at Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 401
- Print publication:
- 1990
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Improvement of Gaas Crystal Quality on Si Grown by Mocvd Through Two-Dimensional-Like Nucleation with Low Temperature in Situ Hydrogen/Arsine Plasma Cleaning
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 37
- Print publication:
- 1990
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Enhancing the Grain Size and {110} Texture of Polycrystalline Si Films By Seed Selection Through Ion Channeling: Implant-Dose Dependence
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- Journal:
- MRS Online Proceedings Library Archive / Volume 53 / 1985
- Published online by Cambridge University Press:
- 28 February 2011, 163
- Print publication:
- 1985
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