For the nano-area analysis of materials, it is necessary to evaluate all data obtained by HRTEM, EDS, EELS, and/or Energy Filter. Up till now, each analytical/imaging instrument required its original computer control system. Thus, the total operational environment for the nano-area analysis was not convenient for us. Recent progress of computer technology provides the ability to build a high performance environment for seamless operation by Client/Server design.
We have developed computer controlled high-throughput integration system based on PC, called FasTEM system, having seamless integration function and real-time remote control function of all instruments related to nano-area analysis. The FasTEM system is composed of Windows NT based Server PC System that is connected to the target TEM via RS232C for integrated operation, and Client PC SYSTEM connected to the Server PC via TCP/IP for remote operation (Fig.l).
Seamless Integration Function
All user interfaces of the analytical/imaging instruments, such as HRTEM, STEM BF/DF, EDS, PEELS and GIF can be seamlessly integrated into the Server PC.