35 results
2D Junction Profiling on Semiconductor Device Reliability Fail
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- Microscopy and Microanalysis / Volume 23 / Issue S1 / July 2017
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- 04 August 2017, pp. 1510-1511
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- July 2017
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Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration
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- Microscopy and Microanalysis / Volume 23 / Issue S1 / July 2017
- Published online by Cambridge University Press:
- 04 August 2017, pp. 1462-1463
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- July 2017
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Nanoscale Strain Mapping in Embedded SiGe Devices by Dual Lens Dark Field Electron Holography and Precession Electron Diffraction
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- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 1963-1964
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- August 2015
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Dual Lens Electron Holography for High Spatial Resolution Junction and Strain Mapping of Semiconductor Devices
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- Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
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- 27 August 2014, pp. 240-241
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- August 2014
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Dual-Lens Electron Holography for Junction Profiling and Strain Mapping of Semiconductor Devices
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- Microscopy Today / Volume 22 / Issue 3 / May 2014
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- 13 May 2014, pp. 28-35
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- May 2014
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Characterization of Strontium Oxide Layers on Silicon for CMOS High-K Gate Stack Scaling
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- Microscopy and Microanalysis / Volume 17 / Issue S2 / July 2011
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- 08 April 2017, pp. 1350-1351
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- July 2011
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Structure and Composition of Metal-Doped HfO2 Gate Oxides in CMOS Devices Studied by High Resolution STEM and EELS
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- Microscopy and Microanalysis / Volume 16 / Issue S2 / July 2010
- Published online by Cambridge University Press:
- 01 August 2010, pp. 1892-1893
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- July 2010
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Strain Mapping on Semiconductor Device by Dark Field Electron Holography
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- Microscopy and Microanalysis / Volume 16 / Issue S2 / July 2010
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- 01 August 2010, pp. 590-591
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- July 2010
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Geometric Limits on Spatial Resolution for Cs Corrected STEM Analysis of Thick TEM Lamellae
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- Microscopy and Microanalysis / Volume 16 / Issue S2 / July 2010
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- 01 August 2010, pp. 150-151
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- July 2010
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Backscattered Electron Imaging in the Scanning Electron Microscope: the Use of Either: (a) High Incident Energy or (b) an Array Detector
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- Microscopy and Microanalysis / Volume 14 / Issue S2 / August 2008
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- 03 August 2008, pp. 120-121
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- August 2008
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Measurement of LER in Poly-Silicon Gates in MOSFETS by (S)TEM
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- Microscopy and Microanalysis / Volume 11 / Issue S02 / August 2005
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- 01 August 2005, pp. 2092-2093
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- August 2005
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Electron Holography with Variable Magnification for Semiconductor Device Characterization
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- Microscopy and Microanalysis / Volume 11 / Issue S02 / August 2005
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- 01 August 2005, pp. 564-565
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- August 2005
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Variable Magnification Electron Holography for 2-D Mapping of Semiconductor Devices
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- Microscopy Today / Volume 12 / Issue 6 / November 2004
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- 14 March 2018, pp. 20-25
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- November 2004
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Combining Eels and Angle-Resolved Aes to Measure Shallow Profiles of Thin Nitrided Oxide Films on Si
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- Microscopy and Microanalysis / Volume 8 / Issue S02 / August 2002
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- 01 August 2002, pp. 596-597
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- August 2002
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Applications of Multi-Variate Statistical Analysis of Spectrum Images to Microelectronic Devices
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- Microscopy and Microanalysis / Volume 7 / Issue S2 / August 2001
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- 02 July 2020, pp. 1158-1159
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- August 2001
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Energy Dispersive X-Ray (EDX) and Electron Energy-Loss (EELS) Spectroscopic Mapping of Microelectronic Devices
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- Microscopy and Microanalysis / Volume 6 / Issue S2 / August 2000
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- 02 July 2020, pp. 1050-1051
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- August 2000
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Analysis of Layered Structures at High Spatial Resolution Using Energy Filtered Imaging
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- MRS Online Proceedings Library Archive / Volume 523 / 1998
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- 10 February 2011, 165
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- 1998
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Identification of Metal-Impurity Gettering Sites in Silicon Formed by Supersaturation Boron Implantation and Annealing Using HRTEM and STEM Micro Analysis
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- Microscopy and Microanalysis / Volume 3 / Issue S2 / August 1997
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- 02 July 2020, pp. 455-456
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- August 1997
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(Under)Graduate Teaching Using Internet Access to Electron Microscopes
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- Microscopy and Microanalysis / Volume 3 / Issue S2 / August 1997
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- 02 July 2020, pp. 1095-1096
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- August 1997
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Application of Nano-Scale Eels Spectrum Lines To Grain Boundaries
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- Microscopy and Microanalysis / Volume 3 / Issue S2 / August 1997
- Published online by Cambridge University Press:
- 02 July 2020, pp. 941-942
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- August 1997
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