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Strain Mapping on Semiconductor Device by Dark Field Electron Holography

Published online by Cambridge University Press:  01 August 2010

YY Wang ,
J Li ,
J Bruley ,
A Domenicucci ,
D Cooper  and
R Jean-Luc
YY Wang
Affiliation:
IBM
J Li
Affiliation:
IBM
J Bruley
Affiliation:
IBM
A Domenicucci
Affiliation:
IBM
D Cooper
Affiliation:
CEA LETI-Minatec, France
R Jean-Luc
Affiliation:
CEA LETI-Minatec, France

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 590 - 591
Copyright
Copyright © Microscopy Society of America 2010