9 results
Fabrication and Performance Limits of Sub-0.1 µm Cu Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D7.1.1
- Print publication:
- 2000
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Processing and Characterization of Silica Xerogel Films for Low-K Dielectric Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 29
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- 1999
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High-Density Plasma Etching of Low Dielectric Constant Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 265
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- 1998
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Characterization of Defects Created in Silicon Due to Etching in Low-Pressure Plasmas Containing Fluorine and Oxygen
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 599
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- 1995
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Detection of Thin Interfacial Layers by Picosecond Ultrasonics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 231
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- 1992
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Plasma Chemical Aspects of Magnetron Ion Etching with CF4/O2 and CF4/H2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 98 / 1987
- Published online by Cambridge University Press:
- 25 February 2011, 217
- Print publication:
- 1987
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The Structure of the Boron-Hydrogen Complex in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 104 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 259
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- 1987
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Anisotropic Dry Etching of S1O2 on Si and its Impact on Surface and Near-Surface Properties of the Substrate.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 68 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 367
- Print publication:
- 1986
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On the Question of Oxygen Diffusion During Oxygen Related Thermal Donor Formation In Silicon.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 71 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 65
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- 1986
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