In this work, we present a study of epitaxial Aluminium Nitride (AlN) for thin film bulk acoustic wave (BAW) applications. Molecular beam epitaxy (MBE) was used to perform high crystalline quality AlN thin films growth on different silicon substrate preparations. A morphological study was performed by atomic force microscopy (AFM) and scanning electron microscopy (SEM), while structural properties and acoustic wave speed were respectively assessed by X-ray diffraction and acoustic picoseconds.

We present an overview of our work concerning the fabrication of GaN-based microcavities grown on silicon substrates dedicated to the observation of the strong light-matter coupling regime. In the view of recent promising results in the field, prospects regarding the improvement of heterostructures in order to observe room temperature polariton lasing from a GaN-based microcavity grown on a silicon substrate will be discussed.

During the last ten years, we have developed an efficient growth process of nitrides on silicon substrates by molecular beam epitaxy. In collaboration with partners AlGaN/GaN HEMTs on Si having promising performances have been fabricated. Focusing on the growth aspect and underlying some of the key issues, we present in this paper an overview of our contribution in the field of AlGaN/GaN HEMTs on Si substrates.

We present experimental results demonstrating strong-light matter coupling at low and room temperature in bulk GaN microcavities. Angle dependent reflectivity measurements demonstrate strong-coupling with a Rabi-energy of 50meV at room temperature which is well reproduced with transfer matrix simulations. The absence of strong coupling in the photoluminescence is attributed to the low finesse of the microcavity (Q=60) and is confirmed by simulations which indicate a quality factor of 90 is required to observe strong-coupling in the emission.

We have studied the influence of a deuterium diffusion on the electrical characteristics of the 2D gas present in AlGaN/GaN heterostructures. The deuterium diffusion is performed by exposing the structures to a rf remote deuterium plasma. We find that both the sheet carrier concentration and the electron mobility decrease and that these effects are partly reversible under thermal annealing. These results suggest that deuterium behave as acceptors in the 2D gas region. The negatively charged deuterium act as additional scattering centers for electrons.