9 results
Si Whisker Growth by Hydrogen Radical using Hot Filament CVD Reactor
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1018 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1018-EE05-30
- Print publication:
- 2007
-
- Article
- Export citation
μ-Raman investigations of plasma hydrogenated silicon
-
- Journal:
- The European Physical Journal - Applied Physics / Volume 23 / Issue 1 / July 2003
- Published online by Cambridge University Press:
- 25 February 2003, pp. 25-32
- Print publication:
- July 2003
-
- Article
- Export citation
Structuring of Silicon Wafer Surfaces on the Sub-100 nm Scale by Hydrogen Plasma Treatments
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 788 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, L3.34
- Print publication:
- 2003
-
- Article
- Export citation
Doping of Oxidized Float Zone Silicon by Thermal Donors - a Low Thermal Budget Doping Method for Device Applications?
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 719 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, F9.5
- Print publication:
- 2002
-
- Article
- Export citation
Comparative Raman and Transmission Electron Microscopy Analysis of the Evolution of Platelet Defects in Plasma Hydrogenated and Annealed Czochralski Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 719 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, F7.4
- Print publication:
- 2002
-
- Article
- Export citation
A Two-Step Low-Temperature Process For A P-N Junction Formation Due To Hydrogen Enhanced Thermal Donor Formation In P-Type Czochralski Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 513 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 337
- Print publication:
- 1998
-
- Article
- Export citation
Comparison of Oxygen and Hydrogen Gettering at High-Temperature Post-Implantation Annealing of Hydrogen and Helium Implanted Czochralski Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 425
- Print publication:
- January 1998
-
- Article
- Export citation
The Conversion of Czochralski Silicon from P-Type to N-Type by Hydrogen Plasma Enhanced Thermal Donor Formation
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 101
- Print publication:
- 1997
-
- Article
- Export citation
Oxygen Gettering and Thermal Donor Formation at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 95
- Print publication:
- 1997
-
- Article
- Export citation