3 results
Characterization of Electron Cyclotron Resonance Plasma-Deposited Hydrogenated Amorphous Silicon and Related Alloy Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 219 / 1991
- Published online by Cambridge University Press:
- 21 February 2011, 679
- Print publication:
- 1991
-
- Article
- Export citation
Electron Cyclotron Resonance Deposition of a-Si:H and a-C:H Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 149 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 63
- Print publication:
- 1989
-
- Article
- Export citation
Amorphous Silicon Deposition Diagnostics Using Coherent Anti-Stokes Raman Spectroscopy
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 95 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 237
- Print publication:
- 1987
-
- Article
- Export citation