2 results
The Selective Epitaxy of Silicon at Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 220 / 1991
- Published online by Cambridge University Press:
- 22 February 2011, 353
- Print publication:
- 1991
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- Article
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Ion Current, Energy Distribution, and Radical Species Detection in RF Plasmas by Cylindrical Mirror Analyzer Quadrupole Mass Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 117 / 1988
- Published online by Cambridge University Press:
- 22 February 2011, 61
- Print publication:
- 1988
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- Article
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