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Fabrication of Ru/Bi4−xLaxTi3O12/Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 784 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, C7.7
- Print publication:
- 2003
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- Article
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