3 results
A two-step UV curing process for producing high tensile stressed silicon nitride layers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1455 / 2012
- Published online by Cambridge University Press:
- 31 July 2012, mrss12-1455-ii12-06
- Print publication:
- 2012
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Stress-Caused Deflections of Asymmetrical Coated Single-Crystal Silicon Elements
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- Journal:
- MRS Online Proceedings Library Archive / Volume 546 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 33
- Print publication:
- 1998
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- Article
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Trapping Behavior of Thin Siliconoxynitride Layers Prepared by Rapid Thermal Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 428 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 421
- Print publication:
- 1996
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- Article
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