6 results
An Alternative Non-contact Planarization Technique by Utilizing the Electrokinetic Phenomenon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-E05-03
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- 2010
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MechanicalModeling of the 2D Interfacial Slurry Pressure in CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F7
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- 2003
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Study of Stresses in Thin Silicon Wafers with Near-infraredphase Stepping Photoelasticity
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- Journal:
- Journal of Materials Research / Volume 17 / Issue 1 / January 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 36-42
- Print publication:
- January 2002
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Nondestructive Measurement of In-Plane Residual Stress in Silicon Strips
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- Journal:
- MRS Online Proceedings Library Archive / Volume 591 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 283
- Print publication:
- 1999
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Interfacial Pressure Measurements at Chemical Mechanical Polishing Interfaces
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 187
- Print publication:
- 1999
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In-Plane Residual Stresses in Filament-Evaporated Aluminum Films on Single Crystal Silicon Wafers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 167 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 365
- Print publication:
- 1989
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