2 results
Plasma enhanced chemical vapor deposition of silicon nitride films from a metal-organic precursor
-
- Journal:
- Journal of Materials Research / Volume 9 / Issue 12 / December 1994
- Published online by Cambridge University Press:
- 03 March 2011, pp. 3019-3021
- Print publication:
- December 1994
-
- Article
- Export citation
Plasma Enhanced Metal-Organic Chemical Vapor Deposition of Germanium Nitride Thin Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 335 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 3
- Print publication:
- 1993
-
- Article
- Export citation