3 results
Comparison of Gate Oxide Processing Techniques for Thin Dielectric Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 41
- Print publication:
- 1996
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Analysis of the Enhanced Growth Rate of Silicon-Oxide Layers in the Thin Regime by Incremental Growth
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- Journal:
- MRS Online Proceedings Library Archive / Volume 280 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 537
- Print publication:
- 1992
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Quantitative Studies on the Evolution of the Polysilicon/Silicon Interfacial Oxide Upon Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 107
- Print publication:
- 1990
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