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Effects of Reactive Gas Compositions on the Magnetic Properties and Microstructures of FeTaNC Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 441 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 169
- Print publication:
- 1996
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- Article
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A Study on the Residual Stress of Diamond-Like Carbon Films Deposited by Magnetically Enhanced RF PECVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 441 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 671
- Print publication:
- 1996
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- Article
- Export citation