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Indentation-derived elastic modulus of multilayer thin films: Effect of unloading-induced plasticity
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- Journal:
- Journal of Materials Research / Volume 30 / Issue 15 / 14 August 2015
- Published online by Cambridge University Press:
- 13 August 2015, pp. 2279-2290
- Print publication:
- 14 August 2015
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- Article
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