3 results
Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1299 / 2011
- Published online by Cambridge University Press:
- 20 January 2011, mrsf10-1299-s02-05
- Print publication:
- 2011
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A Novel Gap Narrowing Process for Creating High Aspect Ratio Transduction Gaps for MEM HF Resonators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1139 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG01-05
- Print publication:
- 2008
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High-Q integrated RF passives and RF-MEMS on silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 783 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, B3.1
- Print publication:
- 2003
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- Article
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