1 results
Atomic layer deposition of epitaxial HfO2 thin films on r-cut sapphire
-
- Journal:
- Journal of Materials Research / Volume 28 / Issue 13 / 14 July 2013
- Published online by Cambridge University Press:
- 17 May 2013, pp. 1680-1686
- Print publication:
- 14 July 2013
-
- Article
- Export citation