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Consumables for the Chemical Mechanical Polishing (Cmp) of Dielectrics and Conductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
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- 25 February 2011, 121
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- 1994
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Planarization Ability of Chemical Mechanical Planarization (Cmp) Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 151
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- 1994
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Chemical Mechanical Polishing for Planarization in Manufacturing Environment
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 99
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- 1994
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Effect of Polishing Pad Material Properties on Chemical Mechanical Polishing (Cmp) Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 637
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- 1994
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Application of Ftir Spectroscopy to the Characterization of as-Deposited and Chemical Mechanical Polished (CMP) Electron Cyclotron Resonance (ECR) Plasma Based SiO2 Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 324 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 249
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- 1993
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Effects of Line Width, Thickness and Alloy Temperature on the Breakdown Energy of thin Aluminum Lines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 723
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- 1992
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Effects of Line Width, Thickness and Alloy Temperature on the Breakdown Energy of Thin Aluminum Lines
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- Journal:
- MRS Online Proceedings Library Archive / Volume 265 / 1992
- Published online by Cambridge University Press:
- 15 February 2011, 165
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- 1992
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