2 results
Thermal Growth of He-cavities in Si Studied by Cascade Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 864 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, E9.7
- Print publication:
- 2005
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- Article
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Evolution Of Defects Induced By High Energy He Implantation In Gold-Diffused Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 669 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, J4.14
- Print publication:
- 2001
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- Article
- Export citation