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Electron Cyclotron Resonance Hydrogen Plasma Induced Defects in Thermally Grown and Spuiter Deposited SiO2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 223 / 1991
- Published online by Cambridge University Press:
- 16 February 2011, 127
- Print publication:
- 1991
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- Article
- Export citation