3 results
The Effect of Fluorine Implantation on Boron Diffusion in Metastable Si0.86 Ge0.14
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C8.15
- Print publication:
- 2004
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- Article
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Synthesis of Buried Layers of β Sic in Single Crystal Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 473
- Print publication:
- 1987
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- Article
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Monitoring SIMOX Layer Properties and Implantation Temperature by Optical Measurements
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 133
- Print publication:
- 1987
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- Article
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