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Lattice Location of Supersaturated Arsenic Atoms in Silicon Studied by Channeled Ion Beam
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- Journal:
- MRS Online Proceedings Library Archive / Volume 279 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 195
- Print publication:
- 1992
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- Article
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The Kinetics of Damage Removal Metastable Carrier Concentration Relaxation and Secondary Defect Evolution During RTA
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- Journal:
- MRS Online Proceedings Library Archive / Volume 100 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 683
- Print publication:
- 1988
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- Article
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